High Aspect Ratio Silicon Nanohole Arrays via Electric-Field-Incorporated Metal-Assisted Chemical Etching

Author

J.Suh.‡, J.Lee.‡, J.Kim., M.Cho., J.Kim., J.M.Oh., H.Han., H.S.Lee., J.Oh.*

Journal

ACS Appl. Mater. Interfaces 2025, 17, 21, 31212–31220

Year

2025

highlight

Highlighted on Supplementary Cover

Link

https://doi.org/10.1021/acsami.5c00564 34회 연결