목록 Fabrication of 50 nm-gate SOI n-MOSFETs using Novel Plasma Doping Technique Author W.-j. Cho, C.-G. Ahn, K. Im, J.-H. Yang, J. Oh, I.-B. Baek, and S. Lee Co-author IEEE Electron Device Letters 25, 366 (2004) Year 2004 IEEE Electron Device Letters 25, 366 (2004)
