목록 Fabrication of silicon nanopillar-based nanocapacitor arrays Author S. Chang, J. Oh, S.T. Boles, and C.V. Thompson* Co-author Applied Physics Letters 96, 153108 (2010) Year 2010 Link https://doi.org/10.1063/1.3374889 322회 연결 Applied Physics Letters 96, 153108 (2010)